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Equipment Fan Filter Unit
Introduction:EFU is installed on upper parts or sides of semiconductor and FPD production facilities to maintain the pressure inside and supply clean air to keep the inside clean.
Features：
1. EFU consists of high performance fan, professionally designed box and HEPA/ULPA filter.
2. The outer casing of the EFU box is made of stainless steel or aluminum alloy plate.
3. The equipment utilizes a powerful fan, allowing it to operate for extended periods under high static pressure, with a minimum noise level of 43 dB(A).
4. Stable operation, low power consumption (low running costs), strong intensity (long service time), low noise, maintenance free, small vibration, uniform velocity, wide range of applications.
5. Structure is compact and firm; installation is easy and convenient.
EFU MODEL LIST – Normal speed
Model No. | EFU5000BL | EFU5001BL | EFU5005BL | EFU5006BL | EFU5009BL | EFU5010BL | EFU5003BL |
Dimension (mm) | 1167*572*161 | 1167*1167*161 | 1500*1000*161 | 1500*1300*161 | 915*610*161 | 635*635*161 | 1220*610*161 |
Input Power | Φ1-200~240v-50/60HZ | ||||||
External Static pressure (mmAq) | 0 | ||||||
Air Velocity(m/s) | 0.5~0.1 | ||||||
Power Consumption(W) | 92 | 174 | 183 | 275 | 75 | 55 | 107 |
Current(A) | 0.42 | 0.8 | 0.84 | 1.23 | 0.36 | 0.27 | 0.49 |
Power factor | 0.98 | 0.99 | 0.99 | 0.99 | 0.95 | 0.94 | 0.98 |
Noise Level(db{A} | 55.7 | 58.9 | 62.5 | 63 | 55.5 | 55 | 56.5 |
filter | 99.9999%ULPA@0.1um or 99.99%HEPA@0.3u | ||||||
EFU Operation Manual
1.EFU Control system configuration
(1)Configuration Arrangement
(2)Detail Arrangement
PS:Other model data sheets that can be obtained by contacting the specialist.
Equipment Fan Filter Unit
Introduction:EFU is installed on upper parts or sides of semiconductor and FPD production facilities to maintain the pressure inside and supply clean air to keep the inside clean.
Features：
1. EFU consists of high performance fan, professionally designed box and HEPA/ULPA filter.
2. The outer casing of the EFU box is made of stainless steel or aluminum alloy plate.
3. The equipment utilizes a powerful fan, allowing it to operate for extended periods under high static pressure, with a minimum noise level of 43 dB(A).
4. Stable operation, low power consumption (low running costs), strong intensity (long service time), low noise, maintenance free, small vibration, uniform velocity, wide range of applications.
5. Structure is compact and firm; installation is easy and convenient.
EFU MODEL LIST – Normal speed
Model No. | EFU5000BL | EFU5001BL | EFU5005BL | EFU5006BL | EFU5009BL | EFU5010BL | EFU5003BL |
Dimension (mm) | 1167*572*161 | 1167*1167*161 | 1500*1000*161 | 1500*1300*161 | 915*610*161 | 635*635*161 | 1220*610*161 |
Input Power | Φ1-200~240v-50/60HZ | ||||||
External Static pressure (mmAq) | 0 | ||||||
Air Velocity(m/s) | 0.5~0.1 | ||||||
Power Consumption(W) | 92 | 174 | 183 | 275 | 75 | 55 | 107 |
Current(A) | 0.42 | 0.8 | 0.84 | 1.23 | 0.36 | 0.27 | 0.49 |
Power factor | 0.98 | 0.99 | 0.99 | 0.99 | 0.95 | 0.94 | 0.98 |
Noise Level(db{A} | 55.7 | 58.9 | 62.5 | 63 | 55.5 | 55 | 56.5 |
filter | 99.9999%ULPA@0.1um or 99.99%HEPA@0.3u | ||||||
EFU Operation Manual
1.EFU Control system configuration
(1)Configuration Arrangement
(2)Detail Arrangement
PS:Other model data sheets that can be obtained by contacting the specialist.
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