ULPA Filter (PTFE)
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ULPA Filter (PTFE) ULPA Filter (PTFE)
ULPA Filter (PTFE) ULPA Filter (PTFE)

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ULPA Filter (PTFE)

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1. Compared with glass fiber, the filter element material used in this product is more durable and has a lower pressure drop (approximately 45% lower).
2. It can be used in clean rooms that are subject to secondary damage caused by semiconductor production lines (FAB) or boron elements.
3. It can be applied to semiconductor processes of a class below CLASS 1.
4. It is highly beneficial for managing the cleanliness of a specific space.
5. It has excellent chemical resistance, oil resistance, water resistance, and weather resistance.
6. Boron elements will not be generated during the manufacturing process of the filter material.
  • ULPA Filter

  • Shu Jia Jing

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NAMEULPA Filter(PTFE)Applicable fieldsSemiconductor, electrical, electronics, hospitals, sterile rooms, and rooms requiring high cleanliness such as those in food manufacturing.
typeBOX,GEl,
FFU,EFU,BFU
frameworkGalvanized iron sheet, galvanized steel sheet, stainless steel sheet, ABS, PVC, etc.
Filter element materialPTFEseparatorE.V.A.
,Olefin
sealantsiliconewasherEPDM,Nitrile rubber, etc.
filtration efficiency≥99.9999%(0.1μm)Use temperature and humidity.60℃(140℉)
90%RH


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